Automatic impedance matching network for ICRH-RF experiments on SST-1

An Automatic Real Time Impedance Matching System for Use in an RF Electrostatics Accelerator Ion Source

A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches

We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulatormetal (MIM) capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate. The presented circuit is well-suited for all applications requiring adaptive im...

Study of RF Source Ignition System with Impedance Matching Network for RF Driven H

This paper presents study of a 6.78 MHz RF source with impedance matching network based inductively coupled plasma generator ignition system for an Hion source. Two types of 10 turn RF antenna (solenoid coil) were developed, to couple the RF power to the ignition plasma chamber. The antenna’s electric parameters were measured using Vector Network Analyzer (VNA). A copper conductor of 3 x 4 mm s...

Impedance matching controller for an inductively coupled plasma chamber - L-type matching network automatic controller

Abstract: Plasma processing is used in a variety of industrial systems, including semiconductor manufacture (deposition and etching) and accurate control of the impedance matching network is vital if repeatable quality is to be achieved at the manufacturing process output. Typically, impedance matching networks employ series (tune) and parallel (load) capacitors to drive the reflection coeffici...

Electronically Tunable Impedance-Matching Networks for Intelligent RF Power Amplifiers

This paper presents the simulation and optimization design of the electronically tunable impedance-matching networks for intelligent RF power amplifiers in a cognitive radio system. Reconfigurable elements, such as varactors and RF switches are utilized to achieve the dynamic impedance matching both in the input and output matching circuit, providing coarse and fine tuning of the target impedan...